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Contact Information
* Company  
Name: 
* Contact  
Name: 
* Phone  
Number: 
* Fax  
Number: 
* Email  
Address: 
* Request  
Date: 
Date EPI   Required: 
* Device: 
* Quantity  
Requested: 
   
Substrate Information
Supplied  
By: 
* Growth  
Method: 
* Diameter: 
* Type: 
* Dopant:  
* Orientation: 
* Angle  
Offset:  
* Resistivity  
Range: 
* Thickness  
Range: 
* Backside  
Conditions: 
* Sb Buried  
Layer: 
* As Buried  
Layer: 
* B Buried  
Layer: 
   
EPI Requirements
* Layer 1  
Thickness   Target:  
* Layer 1   
Thickness LSL:  
Transition  
Width:  
* Layer 1   
Thickness  USL:  
 
* Layer 1   Resistivity   Target:  
* Layer 1    Resistivity LSL:   
* Layer 1   
Resistivity  USL:  
Layer 2  
Thickness   Target:  
Layer 2   
Thickness  LSL:  
Layer 2   
Thickness  USL:  
Layer 2  
Resistivity   Target:  
Layer 2   
Resistivity  LSL:  
Layer 2   
Resistivity  USL:  
* Source   
Gas:  
* Dopant   
Gas:  
* Type:  
Evaluation Method
* Thickness:  
* Resistivity:  
* Inspection  
Criteria:  
   
 
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